[SY-E2] Using IM3D to simulate nano-beam and nano-target effects in ion radiation
Full 3D simulations of ion irradiation are necessary in a wide range of applications to capture the increasing effect of ion leakage out of surfaces or interfaces [Nuclear Fusion 57 (2017) 016038]. Using a recently developed 3D Monte Carlo simulation code IM3D [Scientific Reports 5 (2015) 18130], we first quantify the relative error of the 1D approach in three applications of nano-scale ion implantation: (1) nano-beam for nitrogen-vacancy (NV) center creation, (2) implantation of nanowires to fabricate pn junctions, and (3) irradiation of nano-pillars for small-scale mechanical testing of irradiated materials. Because the 1D approach fails to consider the exchange and leakage of ions from boundaries, its relative error increases dramatically as the beam/target size shrinks. Lastly, the "Bragg peak" phenomenon, where the maximum radiation dose occurs at a finite depth away from the surface, relies on the assumption of broad beams. We discovered a topological transition of the point-defect or defect-cluster distribution isosurface when one varies the beam width, in agreement with a previous focused helium ion beam irradiation experiment. We conclude that full 3D simulations are necessary if either the beam or the target size is comparable or below the SRIM longitudinal ion range. [Nanoscale 10 (2018) 1598]