6:30 PM - 8:00 PM
[H2-PV23-01] Preparation of elemental gradient functional thin films by using mixture powder targets
*Hiroharu Kawasaki1, Tamiko Ohshima1, Yoshihito Yagyu1, Takeshi Ihara1, Yoshiaki Suda2, Yusuke Hibino1 (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))