18:30 〜 20:30

[H2-PR18-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda², Yusuke Hibino¹ (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))

18:30 〜 20:30

[H2-PR18-02] Effects of Y Doping on Properties of InN Films Deposited by Glancing-angle Reactive Evaporation

Mizuki Ide¹, *Kazuya Murata¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:30

[H2-PR18-03] Effects of Deposition Pressure on Electrochromic Properties of WO₃ Films Sputtered with Glancing-angle Deposition Scheme

Yuji Horikoshi¹, *Hiroki Tano¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:30

[H2-PR18-04] Improvement of Al-doped Zinc Oxide Thin Film Deposition Conditions by Sputtering Method Using Powder Target

*Tamiko Ohshima^1,4, Yusuke Hibino¹, Takeshi Ihara¹, Yoshihito Yagyu¹, Hiroharu Kawasaki¹, Yoshiaki Suda², Takahiko Satake³, Shin-ichi Aoqui³, Naho Itagaki⁴, Kazunori Koga⁴, Masaharu Shiratani⁴ (1. NIT Sasebo College (Japan), 2. NIT Ishikawa College (Japan), 3. Sojo Univ. (Japan), 4. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-05] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique

*Feiyu Chen¹, Kunihiro Kamataki¹, Yang Tao¹, Sakyo Okunaga¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu University (Japan), 2. NINS (Japan))

18:30 〜 20:30

[H2-PR18-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH₄ multi-hollow plasma chemical vapor deposition

*Sung-Hwa Hwang¹, Shinjiro Ono¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Tatsuyuki Nakatani³, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Nat'l Inst. of Nat. Sci. (Japan), 3. Okayama Univ. (Japan))

18:30 〜 20:30

[H2-PR18-07] Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma

*Toma Sato¹, Sakyo Okunaga¹, Kunihiro Kamataki¹, Kentaro Tomita², Pan Yiming¹, Daisuke Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Hokkaido Univ. (Japan), 3. NINS (Japan))

18:30 〜 20:30

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

*Kohei Abe¹, Akihiro Yamamoto¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University. (Japan), 2. National Institutes of Natural Sciences (Japan))

18:30 〜 20:30

[H2-PR18-09] Bactericidal mechanism of Rhizobium radiobacter in L-tryptophan solution exposed to oxygen radicals

*Masafumi Ito¹, Naoyuki Iwata², Masaru Hori² (1. Meijo Univ. (Japan), 2. Nagoya Univ. (Japan))

18:30 〜 20:30

[H2-PR18-10] Application Of Non-Thermal Plasma For Removing Metal Ions From Water

*Sayma Khanom¹, Nobuya Hayashi¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-11] Relationship of NH Radicals Produced by Pulsed-Arc Plasma and Efficiency of Steel Nitriding

*Ryuta Ichiki¹, Kento Kojima¹, Noritake Yagawa¹, Kosuke Tachibana¹, Takashi Furuki¹, Seiji Kanazawa¹ (1. Oita Univ. (Japan))

18:30 〜 20:30

[H2-PR18-12] High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device

*Kazuya Yamaguchi¹, Kensuke Sasai², Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1. Department of Electronics, Nagoya Univ. (Japan), 2. cLPS, Nagoya Univ. (Japan), 3. National Institute for Fusion Science (Japan))

18:30 〜 20:30

[H2-PR18-13] Possible plasma oxidation effect on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2): A computational study

*Kazunori Koga^1,2, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Masaharu Shiratani¹, Pankaj Attri¹ (1. Kyushu Univ. (Japan), 2. NINS (Japan))

18:30 〜 20:30

[H2-PR18-14] Kinetic study of effects of discharge power on CO₂ methanation using a plasma catalyst

*Taiki Hasegawa¹, Masashi Ideguchi¹, Daisuke Yamashita¹, Susumu Toko², Kunihiro Kamataki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Osaka Univ. (Japan), 3. NINS (Japan))

18:30 〜 20:30

[H2-PR18-15] In-situ and direct measurement of plasma light emission by color sensor in plasma reactor

*Keiji Sakurai¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1. Univ. Shiga Pref (Japan))

18:30 〜 20:30

[H2-PR18-16] Fabrication of Au-ZnO nanocomposite film for solar photocatalysis using micro-plasma jet operated in open air

*Yoshiki Shimizu¹ (1. National Inst. of Advanced Indus. Sci. and Tech. (AIST) (Japan))

18:30 〜 20:30

[H2-PR18-17] Structural Analysis of Hydrogenated Amorphous Carbon Films Deposited by Capacitively Coupled Plasma Chemical Vapor Deposition

*Shinjiro Ono¹, Sung Hwa Hwang¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Jun Seok Oh³, Susumu Takabayashi⁴, Tatsuyuki Nakatani⁵, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. National Institutes of Natural Sciences (Japan), 3. Osaka City Univ. (Japan), 4. National Institute of Technology, Ariake College (Japan), 5. Okayama University of Science (Japan))

18:30 〜 20:30

[H2-PR18-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

*Yang Tao¹, Daiki Nagamatsu¹, Kunihiro Kamataki¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. NINS. (Japan))

18:30 〜 20:30

[H2-PR18-19] Calibration of force acting on an optically trapped particle in Ar plasma

*Sakyo Okunaga¹, Toma Sato¹, Kunihiro Kamataki¹, Kentaro Tomita², Pan Yiming¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Hokkaido Univ. (Japan), 3. National Institutes of Natural Sci. (Japan))

18:30 〜 20:30

[H2-PR18-20] Analysis of Amorphous carbon film deposition process with FTIR

*Tatsuo Nakai¹, Atsuya Kuwada¹, Ryo Sasamoto¹, Masanori Shinohara¹ (1. Fukuoka University (Japan))

18:30 〜 20:30

[H2-PR18-21] Size and density control of Fe catalyst particles by interval sputtering method for the growth control of CNT forests

*Hirofumi Koji^1,2, Hiroshi Furuta¹, Akimitsu Hatta¹ (1. Kochi Univ. Tech. (Japan), 2. National Inst. Tech., Kitakyushu College (Japan))

18:30 〜 20:30

[H2-PR18-22] Improvement of Energy Cost in Methanation of CO₂ with Plasma Catalysis

*Susumu Toko¹, Masashi Ideguchi², Taiki Hasegawa², Kunihiro Kamataki², Kosuke Takenaka¹, Kazunori Koga², Masaharu Shiratani², Yuichi Setsuhara¹ (1. Osaka Univ. (Japan), 2. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-23] Graphene Growth using Microwave-Excited Atmospheric Pressure Plasma

*Yusuke Sakai¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1. Meijo Univ. (Japan))

18:30 〜 20:30

[H2-PR18-24] Simultaneous synthesis and deposition by utilizing micro-plasma-bubbles

*Yu Yamashita¹, Shinya Sakuma¹, Yu Yamashita¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-25] Fabrication of High-Quality Zinc Oxide Thin Film by Pulsed Laser Deposition

*Sana Tasaki¹, Tamiko Ohshima¹, Hiroharu Kawasaki¹, Yusuke Hibino¹, Takeshi Ihara¹, Yoshihito Yagyu¹ (1. National Institute of Technology, Sasebo College (Japan))

18:30 〜 20:30

[H2-PR18-26] Effect of rf bias on the film property of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition

*Akihiro Yamamoto¹, Kohei Abe¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunishiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. Info. sci. and Electrical Engineering (Japan), 2. National Inst. of Natural Sci. (Japan))

18:30 〜 20:30

[H2-PR18-27] AlN Thin Film Properties Improved by Pressure Gradient Sputtering

*Ken Yonezawa¹, Tatsuyuki Nakatani², Jun Seok Oh ³, Kazunori Koga⁴, Masaharu Shiratani⁴ (1. Kenix Corp. (Japan), 2. Okayama Univ. of Sci. (Japan), 3. Osaka City Univ. (Japan), 4. Kyusyu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-28] Plasma generation for water purification using cavitation bubble in water

*Satoshi Ihara¹ (1. Saga university (Japan))

セッション情報

[H2-PR18] Slot 18

[H2-PR18-01] Preparation of elemental gradient functional thin films by using mixture powder targets

[H2-PR18-02] Effects of Y Doping on Properties of InN Films Deposited by Glancing-angle Reactive Evaporation

[H2-PR18-03] Effects of Deposition Pressure on Electrochromic Properties of WO₃ Films Sputtered with Glancing-angle Deposition Scheme

[H2-PR18-04] Improvement of Al-doped Zinc Oxide Thin Film Deposition Conditions by Sputtering Method Using Powder Target

[H2-PR18-05] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique

[H2-PR18-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH₄ multi-hollow plasma chemical vapor deposition

[H2-PR18-07] Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

[H2-PR18-09] Bactericidal mechanism of Rhizobium radiobacter in L-tryptophan solution exposed to oxygen radicals

[H2-PR18-10] Application Of Non-Thermal Plasma For Removing Metal Ions From Water

[H2-PR18-11] Relationship of NH Radicals Produced by Pulsed-Arc Plasma and Efficiency of Steel Nitriding

[H2-PR18-12] High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device

[H2-PR18-13] Possible plasma oxidation effect on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2): A computational study

[H2-PR18-14] Kinetic study of effects of discharge power on CO₂ methanation using a plasma catalyst

[H2-PR18-15] In-situ and direct measurement of plasma light emission by color sensor in plasma reactor

[H2-PR18-16] Fabrication of Au-ZnO nanocomposite film for solar photocatalysis using micro-plasma jet operated in open air

[H2-PR18-17] Structural Analysis of Hydrogenated Amorphous Carbon Films Deposited by Capacitively Coupled Plasma Chemical Vapor Deposition

[H2-PR18-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

[H2-PR18-19] Calibration of force acting on an optically trapped particle in Ar plasma

[H2-PR18-20] Analysis of Amorphous carbon film deposition process with FTIR

[H2-PR18-21] Size and density control of Fe catalyst particles by interval sputtering method for the growth control of CNT forests

[H2-PR18-22] Improvement of Energy Cost in Methanation of CO₂ with Plasma Catalysis

[H2-PR18-23] Graphene Growth using Microwave-Excited Atmospheric Pressure Plasma

[H2-PR18-24] Simultaneous synthesis and deposition by utilizing micro-plasma-bubbles

[H2-PR18-25] Fabrication of High-Quality Zinc Oxide Thin Film by Pulsed Laser Deposition

[H2-PR18-26] Effect of rf bias on the film property of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition

[H2-PR18-27] AlN Thin Film Properties Improved by Pressure Gradient Sputtering

[H2-PR18-28] Plasma generation for water purification using cavitation bubble in water

認証