Electromechanical coupling hysteresis curve of piezoelectric film/substrate structure in the GHz range

Takahiko Yanagitani

講演情報

Oral Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-O6] Slot 06

2021年12月15日(水) 09:00 〜 11:00 Room A (G401)

Chair: Akira Chikamatsu (The University of Tokyo), Kohei Fujiwara (Tohoku University, JAPAN)

09:00 〜 09:25

[D2-O6-01 (Symposium Invited)] Electromechanical coupling hysteresis curve of piezoelectric film/substrate structure in the GHz range

*Takahiko Yanagitani^1,2,3 (1. Waseda University (Japan), 2. ZAIKEN (Japan), 3. JST-CREST (Japan))

キーワード：Piezoelectric films, BAW filters, Electromechanical coupling, Ferroelectric films, Epitaxial PZT films

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