Characteristic Modification of TCO thin films by Flash Lamp Irradiation

Makoto KASHIWAGI

講演情報

Oral Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-O8] Slot 08

2021年12月16日(木) 09:00 〜 12:00 Room A (G401)

Chair: Hiroshi Yanagi (University of Yamanashi, JAPAN), Hui Ye (College of Optical Science and Engineering, Zhejiang University, China)

09:55 〜 10:10

[D2-O8-03] Characteristic Modification of TCO thin films by Flash Lamp Irradiation

*Makoto KASHIWAGI¹, Kentaro TANAKA¹, Simpei IWASAKI¹, Takehiro YOKOMORI², Yuki OGUCHI¹, Takuya KOMODA³, Yuzo SHIGESATO¹ (1. Aoyama Gakuin Univ. (Japan), 2. Ushio Inc. (Japan), 3. Yamagata Univ. (Japan))

キーワード：Transparent conductive oxide, Flash lamp annealing, Al-doped ZnO, Post-treatment process

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