Materials Research Meeting 2021

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Poster Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-PR14] Slot 14

Tue. Dec 14, 2021 4:00 PM - 6:00 PM D2-PR14 (G403-404)

4:00 PM - 6:00 PM

[D2-PR14-07] Gas sensing properties of SnO2 films deposited by rf magnetron sputtering

*Keita Ohdachi1, Yuzo Shigesato1, Makoto Kashiwagi1, Akira Nakamura2, Yuki Oguchi1, Syouhei Nishikawa1, Hiroki Sone1 (1. Aoyama Gakuin univ. (Japan), 2. MITSUMI ELECTRIC CO., LTD (Japan))

Keywords: SnO2 films, on-tip gas sensor, rf sputtering, hydrogen gas sensor, Pt nano particles

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