[D2-PR14] Slot 14

[D2-PR14-07] Gas sensing properties of SnO₂ films deposited by rf magnetron sputtering

*Keita Ohdachi¹, Yuzo Shigesato¹, Makoto Kashiwagi¹, Akira Nakamura², Yuki Oguchi¹, Syouhei Nishikawa¹, Hiroki Sone¹ (1. Aoyama Gakuin univ. (Japan), 2. MITSUMI ELECTRIC CO., LTD (Japan))

キーワード： SnO2 films, on-tip gas sensor, rf sputtering, hydrogen gas sensor, Pt nano particles