Accumulation, Depletion, Inversion Processes in Metal/Insulator/p-Si Device Evaluated by Displacement Current Measurement

Hoshito Yamamoto

Presentation information

Poster Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-PR14] Slot 14

Tue. Dec 14, 2021 4:00 PM - 6:00 PM D2-PR14 (G403-404)

4:00 PM - 6:00 PM

[D2-PR14-23] Accumulation, Depletion, Inversion Processes in Metal/Insulator/p-Si Device Evaluated by Displacement Current Measurement

*Hoshito Yamamoto¹, Yuya Tanaka^1,2, Tatsuhiro Kambayashi¹, Takeaki Yajima³, Hisao Ishii^1,2,4 (1. GSSE, Chiba Univ. (Japan), 2. CFS, Chiba Univ. (Japan), 3. FISEE, Kyushu Univ. (Japan), 4. MCRC, Chiba Univ. (Japan))

Keywords:MIS, Electrical measurement, Displacement current measurement, Capacitance, Insulator

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