[D2-PR14] Slot 14

[D2-PR14-23] Accumulation, Depletion, Inversion Processes in Metal/Insulator/p-Si Device Evaluated by Displacement Current Measurement

*Hoshito Yamamoto¹, Yuya Tanaka^1,2, Tatsuhiro Kambayashi¹, Takeaki Yajima³, Hisao Ishii^1,2,4 (1. GSSE, Chiba Univ. (Japan), 2. CFS, Chiba Univ. (Japan), 3. FISEE, Kyushu Univ. (Japan), 4. MCRC, Chiba Univ. (Japan))

キーワード：MIS, Electrical measurement, Displacement current measurement, Capacitance, Insulator