Materials Research Meeting 2021

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Poster Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-PR14] Slot 14

Tue. Dec 14, 2021 4:00 PM - 6:00 PM D2-PR14 (G403-404)

4:00 PM - 6:00 PM

[D2-PR14-43] Thermal conductivity of amorphous and polycrystalline WO3 films

*RIku Shimaura1, Makoto Kashiwagi2, Yuichirou Yamashita3, Takashi Yagi3, Naoyuki Taketoshi3, Yuki Oguchi1, Yuzo Shigesato1 (1. Aoyamagakuin Univ. (Japan), 2. Japan Science and Technology Agency (Japan), 3. National Institute of Advanced Industrial Science and Technology (AIST) (Japan))

Keywords:WO3 film, thermal conductivity, amorphous, polycrystalline, dc magnetron sputtering

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