Materials Research Meeting 2021

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Poster Session

D. Frontiers of Advanced Electronic Materials » [D-2] Frontier in Functional Oxides and Related Materials: from Materials Design to Device Applications

[D2-PV22] Slot 22

Tue. Dec 14, 2021 2:00 PM - 3:30 PM D2-PV22 (online)

2:00 PM - 3:30 PM

[D2-PV22-07] Gas sensing properties of SnO2 films deposited by rf magnetron sputtering

*Keita Ohdachi1, Yuzo Shigesato1, Makoto Kashiwagi1, Akira Nakamura2, Yuki Oguchi1, Syouhei Nishikawa1, Hiroki Sone1 (1. Aoyama Gakuin univ. (Japan), 2. MITSUMI ELECTRIC CO., LTD (Japan))

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