Synthesis of bulk silicon oxynitride glasses from aerogels

Yuta Osawa

Presentation information

Oral Session

D. Frontiers of Advanced Electronic Materials » [D-3] Defect Functionalized Energy and Electronic Materials

[D3-O9] Slot 09

Thu. Dec 16, 2021 1:30 PM - 3:30 PM Room M (G312+313)

Chair: Tomofumi Tada (Kyushu University), Peter Sushko (Pacific Northwest National Laboratory)

2:00 PM - 2:15 PM

[D3-O9-02] Synthesis of bulk silicon oxynitride glasses from aerogels

Yuta Osawa^1,2, Kenichiro Iwasaki², Ken-ichi Katsumata², Atsuo Yasumori², Takayuki Nakanishi², Yoshio Matsui¹, Toshiyuki Nishimura¹, Takeo Ohsawa¹, *Hiroyo Segawa^1,2, Naoki Ohashi^1,3 (1. National Institute for Materials Science (Japan), 2. Tokyo University of Science (Japan), 3. Tokyo Institute of Technology (Japan))

Keywords:Sol-gel process, Density, Glass transition temperature, Si-N bonding, Ammonolysis

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