[D3-O9] Slot 09

[D3-O9-02] Synthesis of bulk silicon oxynitride glasses from aerogels

Yuta Osawa^1,2, Kenichiro Iwasaki², Ken-ichi Katsumata², Atsuo Yasumori², Takayuki Nakanishi², Yoshio Matsui¹, Toshiyuki Nishimura¹, Takeo Ohsawa¹, *Hiroyo Segawa^1,2, Naoki Ohashi^1,3 (1. National Institute for Materials Science (Japan), 2. Tokyo University of Science (Japan), 3. Tokyo Institute of Technology (Japan))

キーワード：Sol-gel process, Density, Glass transition temperature, Si-N bonding, Ammonolysis