[D4-O2] Slot 02

[D4-O2-02 (Symposium Invited)] X-ray Tomographic Analysis Using Differential Aperture Technique for AlN Grown on Nano-Patterned Sapphire Substrates

*Yusuke Hayashi¹, Yasuhiko Imai², Nozomi Yamamoto¹, Tetsuya Tohei¹, Kazuhshi Sumitani², Shigeru Kimura², Kanako Shojiki³, Hideto Miyake³, Akira Sakai¹ (1. Osaka Univ. (Japan), 2. JASRI (Japan), 3. Mie Univ. (Japan))

キーワード：AlN, Nano-Patterned Sapphire Substrate, DUV-LED, Synchrotron XRD