Interface chemistry and electric properties of 4H-SiC/SiO<sub>2</sub> and the influence of annealing atmospheres

Presentation information

Oral Session

D. Frontiers of Advanced Electronic Materials » [D-5] Properties and Characterizations of Functional Surfaces and Interfaces

Thu. Dec 16, 2021 1:30 PM - 3:30 PM Room O (G316)

Chair: Shigenori Ueda (National Institute for Materials Science), Yutaka Majima (Tokyo Institute of Technology)

2:30 PM - 2:45 PM

*Anna Regoutz¹ (1. University College London (UK))

Keywords:power electronics, silicon carbide, X-ray photoelectron spectroscopy, buried interfaces

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