Automatic Estimation of XPS Reference Spectra for TiO2 Semiconductor Free from Equipment-derived Arbitrariness

Ryo Murakami

Presentation information

Poster Session

D. Frontiers of Advanced Electronic Materials » [D-5] Properties and Characterizations of Functional Surfaces and Interfaces

[D5-PR13] Slot 13

Tue. Dec 14, 2021 2:00 PM - 3:30 PM D5-PR13 (G403-404)

2:00 PM - 3:30 PM

[D5-PR13-08] Automatic Estimation of XPS Reference Spectra for TiO2 Semiconductor Free from Equipment-derived Arbitrariness

*Ryo Murakami¹, Kenji Nagata², Hideki Yoshikawa², Hiroshi Shinotsuka², Hayaru Shouno¹ (1. The University of Electro-Communications (Japan), 2. NIMS (Japan))

Keywords:X-ray Photo-electron Spectroscopy, Automatic peak separation of multiple-spectra, spectral analysis

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