[E4-O6] Slot 06

[E4-O6-01 (Symposium Invited)] Temperature-Tolerant Electret Material for MEMS Vibrational Energy Harvester

*Hiroyuki Mitsuya¹, Hisayuki Ashizawa¹, Noriko Shimomura¹, Takuma Ishiguro¹, Hiroaki Honma², Gen Hashiguchi³, Hiroshi Toshiyoshi² (1. Saginomiya seisakusho, Inc. (Japan), 2. The Univ. of Tokyo (Japan), 3. Shizuoka Univ. (Japan))

キーワード：MEMS, Energy Harvester, Electret, Temperature-Tolerant, Vacuum Package