Materials Research Meeting 2021

Presentation information

Poster Session

F. Zero Emission Technologies » [F-3] Advanced Water Science and Technology

[F3-PR15] Slot 15

Tue. Dec 14, 2021 6:30 PM - 8:30 PM F3-PR15 (G403-404)

6:30 PM - 8:30 PM

[F3-PR15-11] Application of Flash Lamp Annealing (FLA) Method on Heat Treatment Cu Thin Film and Low Dielectric Resin Films

*Hyumin Oh1,2, Jong-Young Park2,3, Hideo Honma1,2, Kyu Han Kim4, Joo-Hyong Noh1,2 (1. Graduate School of Eng., Kanto Gakuin Univ. (Japan), 2. Materials and Surface Eng. Res. Inst., Kanto Gakuin Univ. (Japan), 3. Daeduck Electronics Co., Ltd. (Korea), 4. Catholic Kwandong Univ. (Korea))

Keywords:Flash Lamp Annealing, Low Dielectric Resin Film, Cu Thin Metal Film, Annealing, Sensor

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