[H1-PR18] Slot 18

[H1-PR18-14] Low temperature deposition of PZT thin films on glass substrate from alkoxide-derived molecular-designed precursors

*Kazuto Yoshida¹, Hisao Suzuki¹, Takashi Arai², Takahiko Kawaguchi¹, Naonori Sakamoto¹, Naoki Wakiya¹, Desheng Fu¹ (1. Shizuoka Univ. (Japan), 2. National Inst. of Tech, Numazu Colledge (Japan))

Keywords:PZT, Thin film, Low temperature, MEMS, Glass