Fabrication of AZO Thin Films by Facing Targets Sputtering System with Various Sputtering Conditions

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-1] Smart Processing

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H1-PR18 (G403-404)

6:30 PM - 8:30 PM

*SangBin Park¹, MoonYoung Lee¹, KyungHwan Kim¹, JeongSoo Hong¹ (1. Gachon Univ. (Korea))

Keywords:AZO, Thin film, Sputtering

Please log in with your participant account.
» Participant Log In