Low temperature deposition of PZT thin films on glass substrate from alkoxide-derived molecular-designed precursors

Kazuto Yoshida

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-1] Smart Processing

[H1-PV23] Slot 23

Tue. Dec 14, 2021 6:30 PM - 8:00 PM H1-PV23 (online)

6:30 PM - 8:00 PM

[H1-PV23-14] Low temperature deposition of PZT thin films on glass substrate from alkoxide-derived molecular-designed precursors

*Kazuto Yoshida¹, Hisao Suzuki¹, Takashi Arai², Takahiko Kawaguchi¹, Naonori Sakamoto¹, Naoki Wakiya¹, Desheng Fu¹ (1. Shizuoka Univ. (Japan), 2. National Inst. of Tech, Numazu Colledge (Japan))

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