Materials Research Meeting 2021

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Oral Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-O7] Slot 07

Wed. Dec 15, 2021 2:30 PM - 6:00 PM Room A (G401)

Chair: Takamasa Okumura, Takeru Okada

3:40 PM - 3:55 PM

[H2-O7-05] Planar Thermal Plasma Jet for Silicon Surface Treatment

*Manabu Tanaka1, Takafumi Okuma1, Takayuki Watanabe1, Tsugio Matsuura2 (1. Kyushu Univ. (Japan), 2. Tasoarc Corp. (Japan))

Keywords:Thermal Plasmas, Lithium-Ion Battery, High-Speed Visualization

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