Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system

Hiroki Kondo

Presentation information

Oral Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-O7] Slot 07

Wed. Dec 15, 2021 2:30 PM - 6:00 PM Room A (G401)

Chair: Takamasa Okumura, Takeru Okada

4:35 PM - 4:50 PM

[H2-O7-08] Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system

*Hiroki Kondo¹, Atsushi Ozaki¹, Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹, Uroš Cvelbar², Mineo Hiramatsu³ (1. Nagoya University (Japan), 2. Jozef Stefan Institute (Slovenia), 3. Meijo University (Japan))

Keywords:Carbon nanowalls, Plasma-enhanced CVD, TEM, Tomography

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