Materials Research Meeting 2021

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Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki1, Tamiko Ohshima1, Yoshihito Yagyu1, Takeshi Ihara1, Yoshiaki Suda2, Yusuke Hibino1 (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))

Keywords:Sputtering, , Elemental gradient functional thin film, Powder target

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