Materials Research Meeting 2021

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Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH4 multi-hollow plasma chemical vapor deposition

*Sung-Hwa Hwang1, Shinjiro Ono1, Takamasa Okumura1, Kunihiro Kamataki1, Naho Itagaki1, Kazunori Koga1,2, Tatsuyuki Nakatani3, Masaharu Shiratani1 (1. Kyushu Univ. (Japan), 2. Nat'l Inst. of Nat. Sci. (Japan), 3. Okayama Univ. (Japan))

Keywords:Carbon nanoparticles, Hydrogenated amorphous carbon, Plasma chemical vapor deposition, Raman spectroscopy

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