Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

Kohei Abe

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

*Kohei Abe¹, Akihiro Yamamoto¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University. (Japan), 2. National Institutes of Natural Sciences (Japan))

Keywords:Plasma CVD, CCP, Simulation, PIC/MCC, IEDF

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