Materials Research Meeting 2021

Presentation information

Print

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

Thu. Dec 16, 2021 6:30 PM - 8:30 PM H2-PR18 (G403-404)

6:30 PM - 8:30 PM

[H2-PR18-20] Analysis of Amorphous carbon film deposition process with FTIR

*Tatsuo Nakai1, Atsuya Kuwada1, Ryo Sasamoto1, Masanori Shinohara1 (1. Fukuoka University (Japan))

Keywords:Amorphous carbon film, Acetylene, FTIR, in-situ and real-time measurement,

Please log in with your participant account.
» Participant Log In