Materials Research Meeting 2021

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Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PV23] Slot 23

Tue. Dec 14, 2021 6:30 PM - 8:00 PM H2-PV23 (online)

6:30 PM - 8:00 PM

[H2-PV23-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

*Yang Tao1, Daiki Nagamatsu1, Kunihiro Kamataki1, Daisuke Yamashita1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1,2, Masaharu Shiratani1 (1. Kyushu Univ. (Japan), 2. NINS. (Japan))

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