Realizing a Pressure Sensor Based on Liquid-Doping of Pulsed Laser Deposited SiC Thin Film

Presentation information

Oral Session

H. Innovative Materials Processing for Sustainable Society » [H-4] Smart Laser Processing for Green Technologies

Wed. Dec 15, 2021 2:30 PM - 6:00 PM Room S (G320)

Chair: Nilesh J. Vasa (Indian Institute of Technology Madras), Siti Rahmah Aid (Universiti Teknologi Malaysia)

4:40 PM - 5:00 PM

*Sree Harsha Ch¹, Paneerselvam E¹, Prasanthakumar H. G¹, Nilesh Jayantilal Vasa¹, Jayaganthan R¹ (1. Indian Institute of Technology Madras (India))

Keywords:Pulsed Laser Deposition, Laser-Assisted Doping, Silicon Carbide, Pressure Sensor

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