Materials Research Meeting 2021

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Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-5] Innovative Material Technologies Utilizing Ion Beams

[H5-PR17] Slot 17

Wed. Dec 15, 2021 4:00 PM - 6:00 PM H5-PR17 (G403-404)

4:00 PM - 6:00 PM

[H5-PR17-03] Surface Condition of Titanium Thin Film Formed on Plastic Substrate by DC magnetron Spattering Method

*Akira Watazu1, Yoshihiro Nishimura2, Kay Teraoka1, Masanobu Tobe2, Tsutomu Sonoda1 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. Lasertec Corporation (Japan))

Keywords:Spattering, thin film, titanium

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