Materials Research Meeting 2021

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-5] Innovative Material Technologies Utilizing Ion Beams

[H5-PV25] Slot 25

Thu. Dec 16, 2021 6:30 PM - 8:00 PM H5-PV25 (online)

6:30 PM - 8:00 PM

[H5-PV25-03] Surface Condition of Titanium Thin Film Formed on Plastic Substrate by DC magnetron Spattering Method

*Akira Watazu1, Yoshihiro Nishimura2, Kay Teraoka1, Masanobu Tobe2, Tsutomu Sonoda1 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. Lasertec Corporation (Japan))

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