MRM2023/IUMRS-ICA2023

セッション情報

Oral Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-O402] Oral 402

2023年12月14日(木) 14:00 〜 16:00 Session 13 (Room I)

Chair: Manabu Tanaka (Kyushu Univ.)

15:00 〜 15:15

*Andrea Jurov1, Aswathy Vasudevan1, Vasyl Shvalya1, Martin Košiček1,2, Janez Zavašnik1, Neelakandan M. Santhosh1, Aleksander Zidanšek2,3,4, Uroš Cvelbar1,2 (1. Department of Gaseous Electronics (F6), Jožef Stefan Institute (Slovenia), 2. International Postgraduate School Jožef Stefan (Slovenia), 3. Faculty of Natural Sciences and Mathematics, University of Maribor (Slovenia), 4. Department of Condensed Matter (F5), Jožef Stefan Institute (Slovenia))

15:15 〜 15:30

*Hiroshi Furuta1,2, Taichi Marui1, Rebekah Arias3, Yuto Sawada1, Ryuichi Shinsei1, Nobuyuki Kameoka1, Tomu Yamamoto1, Kenshin Sakata1, Ryosuke Ooe1, Hokuto Sakoda1, Nathan Chung3, Nezih Pala3, Chunlei Wang3 (1. School of Systems Eng., Kochi Univ. Tech. (Japan), 2. Res. Inst., Kochi Univ. Tech. (Japan), 3. Florida Int'l. Univ. (United States of America))

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