14:00 〜 14:30
*Hisato Yabuta1, Zhiyuan Shen1, Yuta Mido1, Hiroyuki Setoyama2, Ichiro Hirosawa2, Naho Itagaki1 (1. Kyushu Univ. (Japan), 2. Kyushu Synchrotron Light Res. Center (Japan))
Oral Session
G. Process » [G-1] Advanced Plasma Processing in the New Era
2023年12月15日(金) 14:00 〜 16:30 Session 13 (Room I)
Chair: Osamu Sakai (Univ. Shiga Pref.)
14:00 〜 14:30
*Hisato Yabuta1, Zhiyuan Shen1, Yuta Mido1, Hiroyuki Setoyama2, Ichiro Hirosawa2, Naho Itagaki1 (1. Kyushu Univ. (Japan), 2. Kyushu Synchrotron Light Res. Center (Japan))
14:30 〜 14:45
*Naho Itagaki1, Zhiyuan Shen1, Yoshiharu Wada1, Hisato Yabuta1, Naoto Yamashita1, Takamasa Okumura1, Kunihiro Kamataki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu Univ. (Japan))
14:45 〜 15:00
*Ryotaro Harakawa1, Nozomi Takeuchi1, Hidemasa Takana2, Oi Lun Li3 (1. Tokyo Inst. of Tech. (Japan), 2. Tohoku Univ. (Japan), 3. Pusan National Univ. (Korea))
15:00 〜 15:30
*Michael Gordon1 (1. UC Santa Barbara - Chemical Engineering (United States of America))
15:30 〜 16:00
*Dae-Yeong Kim1, Xiaozhong Chen1, Shinya Furukawa2, Tomohiro Nozaki1 (1. Tokyo Institute of Technology (Japan), 2. Osaka University (Japan))
16:00 〜 16:15
*Kunihiro KAMATAKI1, Naho Itagaki1, Daisuke Yamashita1, Takamasa Okumura1, Naoto Yamashita1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu Univ. (Japan))
16:15 〜 16:30
*Kazunori Koga1, Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Kunihiro Kamataki1, Naoto Yamashita1, Naho Itagaki1, Masaharu Shiratani1 (1. Kyushu University (Japan))
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