[A5-O101] Oral 101

[A5-O101-06] Constructing Reactive Neural Network Potentials for Simulating TiN Atomic Layer Deposition

*Hyungmin An¹, Jisu Jung¹, Jisu Kim¹, Jaesun Kim¹, Seungwu Han¹ (1. Seoul National Univ. (Korea))

Keywords:neural network potential, active learning, atomic layer deposition, saddle point search, density functional theory