MRM2023/IUMRS-ICA2023

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Poster Session

A. Fundamentals » [A-5] Advanced Algorithms and Tools for Materials Informatics

[A5-P501] Poster 501

Fri. Dec 15, 2023 10:00 AM - 12:00 PM Poster (Annex)

[A5-P501-07] Molecular Dynamics Study on HF Etching of amorphous Si3N4 with Neural Network Potential

*Changho Hong1, Sangmin Oh1, Seungwu Han1 (1. Seoul National Univ. (Korea))

Keywords:Neural network potential, Surface-plasma interaction, Chemical sputtering, DFT

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