Cr1−xMoxSi2 thin film deposition using multi-target co-sputtering method

Presentation information

Poster Session

B. Energy » [B-1] Thermoelectric Materials for Sustainable Development

Wed. Dec 13, 2023 4:30 PM - 6:30 PM Poster (Annex)

*Takashi Aizawa¹, Takao Mori^1,2 (1. National Inst. for Materials Sci. (Japan), 2. Univ. of Tsukuba (Japan))

Keywords:Silicide, Thin films, Sputtering, Doping

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