Sterilization Effect of Ozone on Rinsing Water for Plating Process

Akihiro Shimizu

Presentation information

Oral Session

C. Environment » [C-4] Advanced Water Treatment and Materials for SDGs

[C4-O203] Oral 203

Tue. Dec 12, 2023 4:30 PM - 6:30 PM Session 3 (Room157)

Chair: Isao Shitanda (Tokyo University of Science), Shu-hei Urashima (Tokyo University of Science), Masahiro Kunimoto (Univ. of Yamanashi)

5:30 PM - 5:45 PM

[C4-O203-05] Sterilization Effect of Ozone on Rinsing Water for Plating Process

*Akihiro Shimizu¹, Makoto Jinsenji¹, Chisa Fukuda¹, Yoshiyuki Nishimura¹, Hibiki Nawai², Natsuki Uchida², Shiro Yamauchi^1,3, Osamu Takai³ (1. OM Sangyo Co. , Ltd. (Japan), 2. OM Kiki Co. , Ltd. (Japan), 3. Materials & Surface Engineering Research Institute, Kanto Gakuin University (Japan))

Keywords:Plating, Rinsing water, Ozone, Sterilizing

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