[D-L204] Late Breaking News

[D-L204-06] Effect of peak power density on deposition of TiO₂ film using high-power pulsed magnetron sputtering

*Takayuki Ohta¹, Miyuki Nishimura¹ (1. Meijo Univ. (Japan))

Keywords:titanium oxide, high-power pulsed magnetron sputtering, rutile