MRM2023/IUMRS-ICA2023

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Late Breaking News

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[D-L204] Late Breaking News

Tue. Dec 12, 2023 6:30 PM - 8:30 PM Poster (Annex)

[D-L204-06] Effect of peak power density on deposition of TiO2 film using high-power pulsed magnetron sputtering

*Takayuki Ohta1, Miyuki Nishimura1 (1. Meijo Univ. (Japan))

Keywords:titanium oxide, high-power pulsed magnetron sputtering, rutile

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