MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O202] Oral 202

Tue. Dec 12, 2023 2:00 PM - 4:05 PM Session 11 (Room B-2)

Chair: Nobuyuki Iwata (Nihon University), Hiroshi Funakubo (Tokyo Institute of Technology)

2:50 PM - 3:05 PM

[D1-O202-02] Imaging Equivalent Oxide Thickness of Dielectric Oxide Films by Scanning Capacitance Microscopy

*Mao-Nan Chang1, Yu-Hsun Hsueh2, Chun-Chieh Wang3, Hsin-Hsuan Wu4, Yi-Shan Wu5 (1. National Chung Hsing Univ. (Taiwan), 2. National Chung Hsing Univ. (Taiwan), 3. National Chung Hsing Univ. (Taiwan), 4. National Chung Hsing Univ. (Taiwan), 5. National Chung Hsing Univ. (Taiwan))

Keywords:SCM, EOT, dc-stress, interface

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