Epitaxial Growth of Ultrawide Bandgap β-(ScxGa1–x)2O3 Films on β-Ga2O3 (100) Substrate by Pulsed-Laser Deposition

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 10:00 AM - 12:00 PM Session 11 (Room B-2)

Chair: Valentin Craciun (Department of Lasers, National Institute for Laser, Plasma and Radiation Physics), Tsukasa Katayama (Hokkaido University)

11:15 AM - 11:30 AM

*Kazuki Koreishi¹, Takuto Soma¹, Akira Ohtomo¹ (1. Tokyo Tech (Japan))

Keywords:Wide-bandgap, Semiconductor alloy, Gallium oxide, Heterostructures, Pulsed-laser deposition

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