MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O302] Oral 302

Wed. Dec 13, 2023 2:00 PM - 4:00 PM Session 11 (Room B-2)

Chair: Nobuyuki Iwata (Nihon University), Uwe Schroeder (Namlab)

2:45 PM - 3:00 PM

[D1-O302-02] Epitaxial Growth of Meta-stable Ferroelectric Hf0.5Zr0.5O2 Assisted by Interfacial Structure Reconstruction

*YUFAN SHEN1, Mitsutaka Haruta1, I-Ching Lin1, Daisuke Kan1, Yuichi Shimakawa1 (1. Kyoto Univ; ICR (Japan))

Keywords:Ferroelectric, Epitaxy, Meta-stable, Hafnium oxide

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