Epitaxial Growth of Meta-stable Ferroelectric Hf0.5Zr0.5O2 Assisted by Interfacial Structure Reconstruction

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 2:00 PM - 4:00 PM Session 11 (Room B-2)

Chair: Nobuyuki Iwata (Nihon University), Uwe Schroeder (Namlab)

2:45 PM - 3:00 PM

*YUFAN SHEN¹, Mitsutaka Haruta¹, I-Ching Lin¹, Daisuke Kan¹, Yuichi Shimakawa¹ (1. Kyoto Univ; ICR (Japan))

Keywords:Ferroelectric, Epitaxy, Meta-stable, Hafnium oxide

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