MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O402] Oral 402

Thu. Dec 14, 2023 2:00 PM - 4:15 PM Session 11 (Room B-2)

Chair: Tetsuya Yamamoto (Kochi University of Technology), Toshihiko Maemoto (Osaka Institute of Technology)

2:00 PM - 2:45 PM

[D1-O402-01 (Symposium Keynote)] Bending durability evaluation of ZnO thin-films grown on cyclo-olefin polymer substrate toward flexible oxide device applications

*Toshihiko Maemoto1 (1. Osaka Inst. of Tech. (Japan))

Keywords:Oxide Semiconductor, Zinc Oxide (ZnO), Flexible, Cyclo-Olefin Polymer(COP), Bending Durability, Nanoindentation

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