MRM2023/IUMRS-ICA2023

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Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O402] Oral 402

Thu. Dec 14, 2023 2:00 PM - 4:15 PM Session 11 (Room B-2)

Chair: Tetsuya Yamamoto (Kochi University of Technology), Toshihiko Maemoto (Osaka Institute of Technology)

2:45 PM - 3:00 PM

[D1-O402-02] Zinc Oxide Films Grown by ALD and Doped with Nitrogen

*Elżbieta Guziewicz1, Oksana Volnianska1, Mahwish Sarwar1, Vitalij Ivanov1 (1. Institute of Physics, Polish Academy of Sciences (Poland))

Keywords:zinc oxide, Atomic Layer Deposition, p-type, photoluminescence, Density Functional Theory

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