Deposition of zinc oxide film using high-power pulsed magnetron sputtering

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Thu. Dec 14, 2023 2:00 PM - 4:15 PM Session 11 (Room B-2)

Chair: Tetsuya Yamamoto (Kochi University of Technology), Toshihiko Maemoto (Osaka Institute of Technology)

3:00 PM - 3:15 PM

*Takayuki Ohta¹, Katsunori Nagahashi¹ (1. Meijo Univ. (Japan))

Keywords:zinc oxide, high-power pulsed magnetron sputtering, low temperature deposition

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