MRM2023/IUMRS-ICA2023

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Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O402] Oral 402

Thu. Dec 14, 2023 2:00 PM - 4:15 PM Session 11 (Room B-2)

Chair: Tetsuya Yamamoto (Kochi University of Technology), Toshihiko Maemoto (Osaka Institute of Technology)

3:45 PM - 4:00 PM

[D1-O402-06] Polishing and etching damages of hydrothermally grown ZnO single crystals studied using time-resolved photoluminescence spectroscopy

*Kohei Shima1, Takumi Kasuya1, Shigefusa F Chichibu1 (1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University (Japan))

Keywords:ZnO, Chemo-mechanical polishing, Wet etching, Reactive ion etching, Time-resolved PL

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