MRM2023/IUMRS-ICA2023

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Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O403] Oral 403

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 11 (Room B-2)

Chair: Katsuhisa Tanaka (Kyoto University), Andreas Klein (Technical University of Darmstadt)

5:00 PM - 5:15 PM

[D1-O403-02] Size Effects and Carrier Transport in Highly Conductive W-Doped In2O3 Films with Thicknesses Ranging from 5 to 50 nm

*Tetsuya Yamamoto1, Rajasekaran Palani1, Hisao Makino1 (1. Kochi Univ. of Tech. (Japan))

Keywords:In2O3, W, Carrier Transport, Size Effect, Solid Phase Crystallization

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