MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O403] Oral 403

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 11 (Room B-2)

Chair: Katsuhisa Tanaka (Kyoto University), Andreas Klein (Technical University of Darmstadt)

5:15 PM - 5:30 PM

[D1-O403-03] Effects of Postannealing on the Structural and Electrical Properties of W-Doped In2O3 Conductive Films Deposited on Glass Substrates

*Rajasekaran Palani1, Tetsuya Yamamoto1, Hisao Makino1 (1. Research Institute, Kochi University of Technology (Japan))

Keywords:Ultra-thin films, In2O3, XRD, Postannealing, Electrical resistivity, Carrier transport

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