MRM2023/IUMRS-ICA2023

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Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-O403] Oral 403

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 11 (Room B-2)

Chair: Katsuhisa Tanaka (Kyoto University), Andreas Klein (Technical University of Darmstadt)

5:30 PM - 5:45 PM

[D1-O403-04] Rapid Thermal Crystallization of H-doped InOx for Thin Film Transistors

*Xiaoqian Wang1, Mamoru Furuta1,2 (1.Kochi Univ. of Tech. (Japan), 2.Kochi University of Tech. (Japan))

Keywords:oxide semiconductor, indium oxide, solid phase crystallization

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